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This work presents a modular, scalable switched capacitor (SC) converter with integrated auxiliary boost converter for high-voltage electrostatic and piezoelectric (PZT) actuators such as could be used for microrobotics, haptics and ultrasound applica-tions. Allowing multiple chips to stack and communicate across series voltage domains, the design can interface from 3.7V battery inputs to over 300Vpp/chip (VCR>80). With 3-chips stacked, the design provides up to 1kVpp (VCR>270), delivering and recover-ing >1W reactive power at >96% efficiency.more » « less
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